VTECO Chillers

Superior temperature control solutions

TRC-Series

Cryogenic Chiller

Cryogenic cooling technology achieves breakthrough: By integrating multi-stage cascade systems with refrigerant-based cycles, it shatters the barrier of single-stage compression, delivering precise temperature control at -90°C.

Product Specifications

Model Channel Temp Range (°C) Temp Stability (°C) Cooling Capacity Process Industry
TRC-7080S Single -70 ~ +80°C ±0.1°C 11kW @ -60°C
8kW @ 30°C
ETCH, CVD Semiconductor
TRC-9020S Single -90 ~ +20°C ±0.2°C 2kW @ -100°C
6kW @ -70°C
ETCH, CVD Semiconductor
TRC-8080D Dual ch1: -80 ~ +50°C
ch2: -55 ~ +60°C
±0.1°C
(both channels)
1.5kW @ -80°C
5.3kW @ 20°C
ETCH, CVD Semiconductor
TRC-8090T Triple ch1: -80 ~ +30°C
ch2: +30 ~ +50°C
ch3: +30 ~ +90°C
±0.1°C
(all channels)
10kW @ -60°C
12kW @ 50°C
10kW @ 40°C
ETCH, CVD Semiconductor