Superior temperature control solutions
Heat Exchanger-Based Refrigeration Technology utilizes indirect heat exchange cycle. Utilizes non-contact energy transfer between external coolant (e.g., chilled water/glycol solution) circulating through plate/shell-and-tube heat exchangers and process fluids (e.g., water/fluorinated liquid), enabling efficient cross-media heat transfer.
| Model | Channel | Temp Range (°C) | Temp Stability (°C) | Cooling Capacity | Process |
|---|---|---|---|---|---|
| THE-3040S | Single | 30 ~ +40°C | ±0.1°C | 4.3kW @ 35°C | ETCH, CVD |
| THE-3090S | Single | 30 ~ +90°C | ±0.1°C | 8kW @ 50°C | ETCH, CVD |
| THE-4034D | Dual | ch1: 100 ~ +340°C ch2: 40 ~ +180°C |
±0.1°C | ch1 (heating): 35.0 @ +150°C to +330°C ch2 (cooling): 360.0 @ +330°C to +150°C |
ETCH, CVD |
| TRC-8090T | Triple | ch1: -80 ~ +30°C ch2: +30 ~ +50°C ch3: +30 ~ +90°C |
±0.1°C | 10kW @ -60°C 12kW @ 50°C 10kW @ 40°C |
ETCH, CVD |