Innovative abatement solutions
The electrical thermal decomposition scrubber uses an electrical heater as the heat source and decomposes flammable gases, combustible gases, and some peroxides at high temperatures of 700–800°C through indirect oxidation.
| Model | Channel | Total Capacity (LPM) | DRE (%) | Combustible Gas | Water Soluble Gas | PFC Gas | Process |
|---|---|---|---|---|---|---|---|
| EHW-600S | Single | 600 | >= 99% | AsH₃, B₂H₆, GeH₄, H₂, PH₃, SiH₄, Si₂H₆, TEB, TEOS | BCl₃, Cl₂, HF, HCl, HBr, NH₃, WF₆ | N/A | ETCH, CVD, METAL, DIFF |
| EHW-1500S | Single | 1500 | >= 99% | AsH₃, B₂H₆, GeH₄, H₂, PH₃, SiH₄, Si₂H₆, TEB, TEOS | BCl₃, Cl₂, HF, HCl, HBr, NH₃, WF₆ | N/A | ETCH, CVD, METAL, DIFF |
| EWW-600S | Single | 600 | >= 99% | N/A | BCl₃, Cl₂, HF, HCl, HBr, NH₃, WF₆ | N/A | ETCH, CVD, METAL, DIFF |
| EWW-1000S | Single | 1000 | >= 99% | N/A | BCl₃, Cl₂, HF, HCl, HBr, NH₃, WF₆ | N/A | ETCH, CVD, METAL, DIFF |
| EWW-1500S | Single | 1500 | >= 99% | N/A | BCl₃, Cl₂, HF, HCl, HBr, NH₃, WF₆ | N/A | ETCH, CVD, METAL, DIFF |