Innovative abatement solutions
The Dry scrubber offers a safe, efficient, and reliable point-of-use abatement solution. Chemisorptive resins are optimized to treat toxic, reactive, ignitable, and corrosive components in process waste gases. The resins convert the gases into non-volatile, stable inorganic solids by irreversible chemical reaction at ambient temperatures. The system is passive, requiring no additional resources (e.g., water, fuel) and continues operating during power failures.
| Model | Channel | Total Capacity (LPM) | DRE (%) | Combustible Gas | Water Soluble Gas | PFC Gas | Process |
|---|---|---|---|---|---|---|---|
| EDD-50S | Single | 50 | >= 99% | AsH₃, PH₃, BF₃ | N/A | N/A | IMP, ETCH, CVD, Ashing |
| EDD-100S | Single | 100 | >= 99% | AsH₃, PH₃, BF₃ | N/A | N/A | IMP, ETCH, CVD, Ashing |
| EDD-200S | Single | 200 | >= 99% | AsH₃, PH₃, BF₃ | N/A | N/A | IMP, ETCH, CVD, Ashing |
| EDD-200D | Dual | 200 | >= 99% | AsH₃, PH₃, BF₃ | BCl₃, Cl₂, HF, HCl, HBr | N/A | IMP, ETCH, CVD, Ashing |
| EDD-400D | Dual | 400 | >= 99% | AsH₃, PH₃, BF₃ | BCl₃, Cl₂, HF, HCl, HBr | N/A | IMP, ETCH, CVD, Ashing |